High Q tunable cavity using dielectric less RF-MEMS varactors

This paper presents first experimental results on high Q MEMS tunable microwave cavity using RF-MEMS switched varactors. MEMS varactors that have been used in this work are based on a dielectric less tunable cantilever actuator, with good reliability and well-established fabrication process. It is shown that one can obtain large Q using type of component, with measured Q_u between 550 and 850 for a tuning range of 500 MHz around 5 GHz.