Title :
Measurement and modelling of low resistivity silicon substrate coplanar-strip (CPS) waveguides made in standard silicon technology
Author :
Berg, H. ; Jacobsson, H. ; Berg, K. ; Schuppen, A. ; Gevorgian, S.
Author_Institution :
Chalmers Univ. of Technol., Goteborg, Sweden
Abstract :
A method to reduce the losses in coplanar transmission lines on silicon is presented. It is based on optimization of the cross section of the transmission line and does not require the introduction of new processing steps.
Keywords :
MMIC; coplanar transmission lines; electrical resistivity; elemental semiconductors; equivalent circuits; losses; silicon; strip lines; substrates; transmission line theory; Si; Si MMICs; coplanar transmission lines; coplanar-strip waveguides; losses reduction; low resistivity Si substrate; microwave losses; modelling; standard Si technology; transmission line cross section optimisation; Conductivity; Coplanar transmission lines; Coplanar waveguides; Fabrication; Frequency; Jacobian matrices; MMICs; Silicon; Strips; Transmission line measurements;
Conference_Titel :
Silicon Monolithic Integrated Circuits in RF Systems, 2000. Digest of Papers. 2000 Topical Meeting on
Conference_Location :
Garmisch, Germany
Print_ISBN :
0-7803-6255-1
DOI :
10.1109/SMIC.2000.844306
