Title :
SIMMWIC-MEMS 180/spl deg/ switched line phase shifter
Author :
Pilz, D. ; Strohm, K.M. ; Luy, J.F.
Author_Institution :
DaimlerChrysler Aerosp., Ulm, Germany
Abstract :
Design and results of a 180/spl deg/ SIMMWIC (silicon millimeter wave integrated circuit) phase shifter using CPW-MEMS shunt switches is presented. The phase shifter exhibits low loss (<1 dB@35 GHz) and high accuracy of the phase shift (<3%).
Keywords :
MIMIC; coplanar waveguide components; elemental semiconductors; membranes; micromechanical devices; microwave switches; millimetre wave phase shifters; silicon; 1 dB; 35 GHz; CPW-MEMS shunt switches; MEMS phase shifter; Si; Si MIMIC phase shifter; Si MM-wave IC; membrane switch fabrication process; millimeter wave integrated circuit; switched line phase shifter; Biomembranes; Electrodes; Fabrication; Gold; Phase shifters; Phased arrays; Resists; Silicon; Switches; Switching circuits;
Conference_Titel :
Silicon Monolithic Integrated Circuits in RF Systems, 2000. Digest of Papers. 2000 Topical Meeting on
Conference_Location :
Garmisch, Germany
Print_ISBN :
0-7803-6255-1
DOI :
10.1109/SMIC.2000.844311
