Title :
X-band tunable MEMS resonators
Author :
Muldavin, J.B. ; Rebeiz, Gabriel M.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
This paper demonstrates the use of MEMS varactors and switches in tunable resonators for filter and oscillator applications. These MEMS varactors and switches have higher quality factors and much lower loss than typical varactor diodes, making them suitable for use in high Q circuits. Equivalent circuit models for the shunt switch and varactor are presented and are used to fabricate tunable resonators around 10 GHz. Application areas are tunable filters and low phase-noise oscillators for communications systems.
Keywords :
MMIC oscillators; Q-factor; coplanar waveguide components; equivalent circuits; micromechanical resonators; microwave filters; microwave switches; tuning; varactors; 10 GHz; CPW; MEMS switches; MEMS varactors; X-band resonators; equivalent circuit models; filter applications; high Q circuits; low phase-noise oscillators; quality factors; shunt switch; tunable MEMS resonators; varactor diodes; Diodes; Equivalent circuits; Micromechanical devices; Oscillators; Q factor; Resonator filters; Switches; Switching circuits; Tunable circuits and devices; Varactors;
Conference_Titel :
Silicon Monolithic Integrated Circuits in RF Systems, 2000. Digest of Papers. 2000 Topical Meeting on
Conference_Location :
Garmisch, Germany
Print_ISBN :
0-7803-6255-1
DOI :
10.1109/SMIC.2000.844312
