Title :
Improvement of fabrication yield and loss uniformity of waveguide mirror
Author :
Park, Jeong-Woo ; Song, Jung-Ho ; Sim, Eun-Deok ; Beak, Yong-Soon
Author_Institution :
Opt. Commun. Devices Dept., Electron. & Telecommun. Res. Inst., Daejeon, South Korea
Abstract :
Using a new design method, improvement of fabrication yield and uniformity were obtained for waveguide mirror for PIC and optical PCB. Analysis shows that the most significant source of loss is the bevel of facet.
Keywords :
integrated optics; mirrors; optical design techniques; optical fabrication; optical losses; optical waveguide components; PIC; fabrication yield; facet bevel; loss uniformity; optical PCB; waveguide mirror; Etching; Mirrors; Optical device fabrication; Optical devices; Optical losses; Optical surface waves; Optical waveguides; Rough surfaces; Surface roughness; Turning;
Conference_Titel :
Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
Print_ISBN :
0-7803-8557-8
DOI :
10.1109/LEOS.2004.1363560
