• DocumentCode
    2024922
  • Title

    Dielectric charging and thermally activated processes in MEMS capacitive switches

  • Author

    Papaioannou, George ; Tavasolian, Negar ; Goldsmith, Charles ; Papapolymerou, John

  • Author_Institution
    Nat. Kapodistrian Univ. of Athens, Athens, Greece
  • fYear
    2009
  • fDate
    28-29 Sept. 2009
  • Firstpage
    399
  • Lastpage
    402
  • Abstract
    The paper investigates dielectric charging effects for capacitive RF MEMS switches with SiO2 as the dielectric material. Two different actuation schemes are implemented in order to incorporate and better understand the charging history over time. Experimental results indicate that regardless of the actuation scheme the charging is thermally in principle, and that the activation energy decreases as the voltage sweep rate increases.
  • Keywords
    microswitches; silicon compounds; RF MEMS capacitive switches; activation energy; dielectric charging; dielectric material; thermally activated processes; voltage sweep rate; Capacitance-voltage characteristics; Dielectric materials; Micromechanical devices; Radiofrequency microelectromechanical systems; Rough surfaces; Surface charging; Surface roughness; Switches; Switching circuits; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Integrated Circuits Conference, 2009. EuMIC 2009. European
  • Conference_Location
    Rome
  • Print_ISBN
    978-1-4244-4749-7
  • Type

    conf

  • Filename
    5296437
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2024922