• DocumentCode
    2024940
  • Title

    Recent progress in thin film shape memory microactuators

  • Author

    Johnson, David A. ; Shahoian, Erik J.

  • fYear
    1995
  • fDate
    29 Jan-2 Feb 1995
  • Firstpage
    216
  • Keywords
    Actuators; Consumer electronics; Costs; Microactuators; Micromechanical devices; Shape memory alloys; Substrates; Transistors; Valves; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
  • Print_ISBN
    0-7803-2503-6
  • Type

    conf

  • DOI
    10.1109/MEMSYS.1995.472577
  • Filename
    472577
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2024940