Title :
Recent progress in thin film shape memory microactuators
Author :
Johnson, David A. ; Shahoian, Erik J.
fDate :
29 Jan-2 Feb 1995
Keywords :
Actuators; Consumer electronics; Costs; Microactuators; Micromechanical devices; Shape memory alloys; Substrates; Transistors; Valves; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472577
