Title :
New Design Tools for High Fabrication Yield Low Cost Monolithic GaAs Circuits using Passive and Active Components Statistical Models
Author :
Gamand, P. ; Leblanc, R. ; Levent-Villegas, M. ; Rabinzohn, P.
Abstract :
This paper contains experimental data concerning passive and active components used in our standard MMIC design. Statistical models are established. Simulated variations of the performances of distributed amplifiers over 2" wafers are presented and compared with measured variations.
Keywords :
Capacitance; Circuits; Costs; Electrical resistance measurement; Fabrication; Gallium arsenide; MIM capacitors; MMICs; Resistors; Semiconductor device modeling;
Conference_Titel :
Microwave Conference, 1986. 16th European
Conference_Location :
Dublin, Ireland
DOI :
10.1109/EUMA.1986.334259