DocumentCode :
2025150
Title :
MEMS for pressure distribution studies of gaseous flows in microchannels
Author :
Liu, Jianqiang ; Yu-chong Tai ; Chih-Ming HoKin-Cheonk Pong
fYear :
1995
fDate :
29 Jan-2 Feb 1995
Firstpage :
209
Keywords :
Boundary conditions; Fabrication; Fluid flow; Fluid flow measurement; Geometry; Microchannel; Microfluidics; Micromachining; Micromechanical devices; Sensor systems;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
Type :
conf
DOI :
10.1109/MEMSYS.1995.472578
Filename :
472578
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2025150
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