Title :
Reconstruction of a profile function using the knowledge of the nonsymmetric intensity of X-rays diffraction in thin films
Author_Institution :
Dept. of Comput. Phys., St.-Petersburg State Univ., St. Petersburg, Russia
Abstract :
The method of reconstruction of a profile function in thin films by X-ray diffraction experiments is extended to asymmetric diffraction pattern.
Keywords :
X-ray diffraction; thin films; X-rays diffraction; asymmetric diffraction pattern; nonsymmetric intensity; thin films; Electronic mail; Epitaxial growth; Fourier transforms; Gaussian processes; Image reconstruction; MONOS devices; Nanostructures; Physics computing; Transistors; X-ray diffraction;
Conference_Titel :
Days on Diffraction, 2008. DD '08. Proceedings of the International Conference
Conference_Location :
St. Petersburg
Print_ISBN :
978-5-9651-0277-8
