Author :
Taylor, Charles S. ; Cherkas, Paul ; Hampton, Hilary ; Frantzen, John J. ; Shah, Bob O. ; Tiffany, William B. ; Nanis, Leonard ; Booker, Philip ; Salahieh, Amr ; Hansen, Richard
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE