Title :
Deformable MEMS micromirror array for wavelength and angle insensitive retroreflecting modulators
Author :
Chan, T.K. ; Ford, J.E.
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., San Diego, CA, USA
Abstract :
We demonstrate a large-aperture, angle-insensitive MEMS modulator that switches from flat to a reflective microlens array. We measure 10 dB contrast with 0.55 μm sag, and calculate 0.8 μm sag will produce 20 dB contrast.
Keywords :
microlenses; micromechanical devices; micromirrors; optical arrays; optical links; optical modulation; angle insensitive retroreflecting modulators; deformable MEMS micromirror array; microlens array; wavelength insensitive retroreflecting modulators; Apertures; Diffraction; Lenses; Lighting; Micromechanical devices; Micromirrors; Microoptics; Mirrors; Silicon; Voltage;
Conference_Titel :
Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
Print_ISBN :
0-7803-8557-8
DOI :
10.1109/LEOS.2004.1363588
