Title :
Thermo-mechanical structures for the optimisation of silicon micromachined gas sensors
Author :
Gotz, A. ; Gràcia, L. ; Cane, C. ; Ozano, M.L. ; Lora-Tamayo, E.
Author_Institution :
Centro Nacional de Microelectron., Bellaterra, Spain
Abstract :
Thermal and mechanical characterisation has been carried out on simple test structures that allow the optimisation of the size, power consumption and mechanical robustness of thermally isolated membranes for semiconductor gas sensors fabricated on silicon micromachined substrates. Breakdown pressure, working temperature and heat distribution are the parameters that have been considered of interest for the development of the sensor structures.
Keywords :
elemental semiconductors; gas sensors; heat losses; internal stresses; membranes; microsensors; optimisation; power consumption; semiconductor device reliability; semiconductor device testing; silicon; temperature distribution; FEM simulation; Si; breakdown pressure; heat distribution; heat losses; mechanical characterisation; mechanical integrity; mechanical robustness; membrane size; micromachined gas sensors; optimisation; power consumption; semiconductor gas sensors; test chip; thermal characterisation; thermally isolated membranes; thermomechanical structures; working temperature; Biomembranes; Electric breakdown; Energy consumption; Gas detectors; Robustness; Semiconductor device testing; Silicon; Substrates; Temperature sensors; Thermomechanical processes;
Conference_Titel :
Microelectronic Test Structures, 2000. ICMTS 2000. Proceedings of the 2000 International Conference on
Print_ISBN :
0-7803-6275-7
DOI :
10.1109/ICMTS.2000.844411
