Single-chip photonic integration with CMOS for aerospace

Shared shuttle runs are an important factor in the microelectronics business ecosystem - allowing fables semiconductor companies to access advanced processes and supporting the development of new tools and processes. We report on the creation and progress of a shared shuttle program for access to advanced silicon photonics optoelectronic platforms. We present an 18 GHz integrated traveling-wave Mach-Zehnder modulator, with small-signal Vπ of 6V, and discuss sources of nonlinearity in our platform. A ring modulator is shown to have an SFDR_IMD of 84 dB.Hz^2/3. We present the first measurements of the nonlinear distortions of silicon-based traveling-wave modulators, and demonstrate an SFDR_IMD of 103 dB.Hz^2/3.