Title :
Piezoelectric composites for micro-ultrasonic transducers realized with deep-etch X-ray lithography
Author :
Hirata, Yoshihiro ; Okuyama, Hiroshi ; Ogino, Seiji ; Numazawa, T. ; Takada, Hiroaki
fDate :
29 Jan-2 Feb 1995
Keywords :
Ceramics; Etching; Frequency; Piezoelectric transducers; Plasma applications; Plasma measurements; Polymers; Resists; Slurries; X-ray lithography;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472581
