• DocumentCode
    2026056
  • Title

    Piezoelectric composites for micro-ultrasonic transducers realized with deep-etch X-ray lithography

  • Author

    Hirata, Yoshihiro ; Okuyama, Hiroshi ; Ogino, Seiji ; Numazawa, T. ; Takada, Hiroaki

  • fYear
    1995
  • fDate
    29 Jan-2 Feb 1995
  • Firstpage
    191
  • Keywords
    Ceramics; Etching; Frequency; Piezoelectric transducers; Plasma applications; Plasma measurements; Polymers; Resists; Slurries; X-ray lithography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
  • Print_ISBN
    0-7803-2503-6
  • Type

    conf

  • DOI
    10.1109/MEMSYS.1995.472581
  • Filename
    472581
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2026056