Title :
Characterization of microdefects and microroughness in silicon wafers by a Rayleigh-Brillouin scatte
Author :
Lu Taijing ; Ng, S.C.
Keywords :
Absorption; Chemical lasers; Etching; Laser beams; Laser modes; Optical polarization; Power lasers; Silicon; Surface emitting lasers; Temperature;
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
DOI :
10.1109/CLEOPR.1995.529649
