Title :
Variable entrance slit system for precision spectrophotometers
Author :
Wuilleumier, R. ; Kraiczek, K.
fDate :
29 Jan-2 Feb 1995
Keywords :
Aluminum; Apertures; Assembly systems; Diodes; Fatigue; Gears; Machining; Qualifications; Signal resolution; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472583
