DocumentCode

2026543

Title

Variable entrance slit system for precision spectrophotometers

Author

Wuilleumier, R. ; Kraiczek, K.

fYear

1995

fDate

29 Jan-2 Feb 1995

Firstpage

181

Keywords

Aluminum; Apertures; Assembly systems; Diodes; Fatigue; Gears; Machining; Qualifications; Signal resolution; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE

Print_ISBN

0-7803-2503-6

Type

conf

DOI

10.1109/MEMSYS.1995.472583

Filename

472583