Title :
Diffraction grating scanners using polysilicon micromotors
Author :
Yasseen, A.A. ; Smith, S.W. ; Mehregany, M. ; Merat, F.L.
fDate :
29 Jan-2 Feb 1995
Keywords :
Chemicals; Diffraction gratings; High speed optical techniques; Micromotors; Nickel; Optical design; Optical device fabrication; Optical diffraction; Optical reflection; Optical surface waves;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472584
