DocumentCode
2026809
Title
Diffraction grating scanners using polysilicon micromotors
Author
Yasseen, A.A. ; Smith, S.W. ; Mehregany, M. ; Merat, F.L.
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
175
Keywords
Chemicals; Diffraction gratings; High speed optical techniques; Micromotors; Nickel; Optical design; Optical device fabrication; Optical diffraction; Optical reflection; Optical surface waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472584
Filename
472584
Link To Document