DocumentCode
2027161
Title
Tunable IR filters using flexible metallic microstructures
Author
Ohnstein, T.R. ; Zook, J.D. ; Cox, Jonathan A. ; Wagener, T.J. ; Guckel, H. ; Christenson, T.R.
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
170
Keywords
Cutoff frequency; Hydraulic actuators; Magnetic separation; Microstructure; Nonlinear filters; Optical arrays; Optical attenuators; Optical filters; Optical imaging; Optical waveguides;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472585
Filename
472585
Link To Document