Title :
Chemical analysis in nanoscale needs, possibilities, techniques and outlooks
fDate :
29 Jan-2 Feb 1995
Keywords :
Biosensors; Boring; Chemical analysis; Chemical and biological sensors; Chemical technology; Chemistry; Electrokinetics; Molecular biophysics; Monitoring; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472586