Nonlinearity and hysteresis of resonant strain gauges

Author

Gui, Chengqun ; Legtenberg, Rob ; Tilmans, Harrie A C ; Fluitman, Jan H J ; Elwenspoek, Miko

fYear

1995

fDate

29 Jan-2 Feb 1995

Firstpage

157

Keywords

Capacitive sensors; Geometry; Hysteresis; Nonlinear equations; Q factor; Resonance; Resonant frequency; Springs; Tensile stress; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE

Print_ISBN

0-7803-2503-6

Type

DOI

10.1109/MEMSYS.1995.472588

Filename

472588

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