Title :
Merging Optics With Microelectronic Systems: Compatibility Of GaAs Heteroepitaxy With Submicron Si CMOS
Author :
Hornak, L.A. ; Tewksbury, S.K. ; Nariman, H.E.
Author_Institution :
West Virginia University
Keywords :
CMOS process; CMOS technology; Gallium arsenide; Merging; Microelectronics; Optical interconnections; Rapid thermal processing; Silicides; Silicon; Ultra large scale integration;
Conference_Titel :
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Print_ISBN :
0-7803-0526-4
DOI :
10.1109/LEOS.1992.694032
