DocumentCode :
2028467
Title :
Fluid micropumps based on rotary magnetic actuators
Author :
Ahn, Chong H. ; Allen, Mark G.
fYear :
1995
fDate :
29 Jan-2 Feb 1995
Firstpage :
408
Keywords :
Control systems; Fluid flow; Fluid flow control; Frequency; Magnetic liquids; Microelectronics; Micromagnetics; Micropumps; Pneumatic actuators; Pumps;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
Type :
conf
DOI :
10.1109/MEMSYS.1995.472590
Filename :
472590
Link To Document :
بازگشت