Title :
Fluid micropumps based on rotary magnetic actuators
Author :
Ahn, Chong H. ; Allen, Mark G.
fDate :
29 Jan-2 Feb 1995
Keywords :
Control systems; Fluid flow; Fluid flow control; Frequency; Magnetic liquids; Microelectronics; Micromagnetics; Micropumps; Pneumatic actuators; Pumps;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472590