• DocumentCode
    2028640
  • Title

    Dielectric charging and thermally activated processes in MEMS capacitive switches

  • Author

    Papaioannou, George ; Tavasolian, Negar ; Goldsmith, Charles ; Papapolymerou, John

  • Author_Institution
    Nat. Kapodistrian Univ. of Athens, Athens, Greece
  • fYear
    2009
  • fDate
    Sept. 29 2009-Oct. 1 2009
  • Firstpage
    1752
  • Lastpage
    1755
  • Abstract
    The paper investigates dielectric charging effects for capacitive RF MEMS switches with SiO2 as the dielectric material. Two different actuation schemes are implemented in order to incorporate and better understand the charging history over time. Experimental results indicate that regardless of the actuation scheme the charging is thermally in principle, and that the activation energy decreases as the voltage sweep rate increases.
  • Keywords
    microswitches; microwave switches; silicon compounds; MEMS capacitive switch; RF switch; SiO2; activation energy; dielectric charging; Capacitance-voltage characteristics; Dielectric materials; Micromechanical devices; Radiofrequency microelectromechanical systems; Rough surfaces; Surface charging; Surface roughness; Switches; Temperature; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 2009. EuMC 2009. European
  • Conference_Location
    Rome
  • Print_ISBN
    978-1-4244-4748-0
  • Type

    conf

  • Filename
    5296573
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2028640