• DocumentCode
    2028750
  • Title

    Bulk silicon micro electro mechanical devices fabricated from commercial BESOI substrates

  • Author

    Benitez, A. ; Esteve, J. ; Bausells, J.

  • fYear
    1995
  • fDate
    29 Jan-2 Feb 1995
  • Firstpage
    404
  • Keywords
    Electrostatics; Etching; Fabrication; Integrated circuit technology; Micromachining; Micromotors; Microstructure; Resists; Silicon; Wafer bonding;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
  • Print_ISBN
    0-7803-2503-6
  • Type

    conf

  • DOI
    10.1109/MEMSYS.1995.472591
  • Filename
    472591
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2028750