Title :
Bulk silicon micro electro mechanical devices fabricated from commercial BESOI substrates
Author :
Benitez, A. ; Esteve, J. ; Bausells, J.
fDate :
29 Jan-2 Feb 1995
Keywords :
Electrostatics; Etching; Fabrication; Integrated circuit technology; Micromachining; Micromotors; Microstructure; Resists; Silicon; Wafer bonding;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472591
