Title :
Back-illuminated Large-area High-speed In0.53Ga0.47As/In0.52Al0.48As MSM Photodetector
Author :
Griem, H. Torsten ; Kim, Jae H. ; Friedman, Robert A. ; Chan, Eric Y. ; Ray, Sankar
Author_Institution :
Boeing Defense & Space Group
Keywords :
Absorption; Bandwidth; Dark current; Detectors; Electrons; Fingers; Packaging; Parasitic capacitance; Photodetectors; Voltage;
Conference_Titel :
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Print_ISBN :
0-7803-0526-4
DOI :
10.1109/LEOS.1992.694043