Title :
Evaluation of the micro wobble motor fabricated by concentric build-up process
Author :
Nakamura, K. ; Ogura, H. ; Maeda, S. ; Sangawa, U. ; Aoki, S. ; Sato, T.
fDate :
29 Jan-2 Feb 1995
Keywords :
Electrodes; Fabrication; Friction; Micromotors; Motion measurement; Rotors; Sputtering; Stators; Torque; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472593
