DocumentCode
2030027
Title
A differential pressure liquid flow sensor for flow regulation and dosing systems
Author
Boillat, M.A. ; van der Wiel, A.J. ; Hoogerwerf, A.C. ; de Rooij, N.F.
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
350
Keywords
Equations; Fluid flow; Fluid flow control; Fluid flow measurement; Pressure measurement; Sensor phenomena and characterization; Sensor systems; Silicon; Temperature sensors; Viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472596
Filename
472596
Link To Document