DocumentCode
2030211
Title
Exact closed-form expressions for substrate resistance and capacitance extraction in nanoscale VLSI
Author
Bontzios, Yiorgos I. ; Dimopoulos, Michael G. ; Hatzopoulos, Alkis A.
Author_Institution
Dept. of Electr. & Comput. Eng., Aristotle Univ. of Thessaloniki, Thessaloniki, Greece
fYear
2011
fDate
6-8 April 2011
Firstpage
1
Lastpage
5
Abstract
In this work a new exact formula for determining the substrate resistance and capacitance is presented. For the formula analytical results of the Laplace equations of equivalent problems are exploited. Both simulation and measurement data are utilized in order to show the validity of the proposed formula. The measurement data are obtained from a fabricated test chip. The results show that the proposed method succeeds in computing the substrate resistance.
Keywords
Laplace equations; VLSI; nanoelectronics; substrates; Laplace equation; capacitance extraction; exact closed-form expression; nanoscale VLSI; substrate resistance; Capacitance; Conductivity; Couplings; Resistance; Semiconductor device measurement; Stripline; Substrates; Closed form; Integrated circuits; Substrate noise;
fLanguage
English
Publisher
ieee
Conference_Titel
Design & Technology of Integrated Systems in Nanoscale Era (DTIS), 2011 6th International Conference on
Conference_Location
Athens
Print_ISBN
978-1-61284-899-0
Type
conf
DOI
10.1109/DTIS.2011.5941413
Filename
5941413
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