Title :
Exact closed-form expressions for substrate resistance and capacitance extraction in nanoscale VLSI
Author :
Bontzios, Yiorgos I. ; Dimopoulos, Michael G. ; Hatzopoulos, Alkis A.
Author_Institution :
Dept. of Electr. & Comput. Eng., Aristotle Univ. of Thessaloniki, Thessaloniki, Greece
Abstract :
In this work a new exact formula for determining the substrate resistance and capacitance is presented. For the formula analytical results of the Laplace equations of equivalent problems are exploited. Both simulation and measurement data are utilized in order to show the validity of the proposed formula. The measurement data are obtained from a fabricated test chip. The results show that the proposed method succeeds in computing the substrate resistance.
Keywords :
Laplace equations; VLSI; nanoelectronics; substrates; Laplace equation; capacitance extraction; exact closed-form expression; nanoscale VLSI; substrate resistance; Capacitance; Conductivity; Couplings; Resistance; Semiconductor device measurement; Stripline; Substrates; Closed form; Integrated circuits; Substrate noise;
Conference_Titel :
Design & Technology of Integrated Systems in Nanoscale Era (DTIS), 2011 6th International Conference on
Conference_Location :
Athens
Print_ISBN :
978-1-61284-899-0
DOI :
10.1109/DTIS.2011.5941413
