DocumentCode

2030544

Title

Carbon dioxide priming of micro liquid systems

Author

Zengerle, R. ; Leitner, M. ; Kluge, S. ; Richter, A.

fYear

1995

fDate

29 Jan-2 Feb 1995

Firstpage

340

Keywords

Atmosphere; Carbon dioxide; Liquids; Microfluidics; Plastics; Pumps; Silicon; Solids; Surface tension; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE

Print_ISBN

0-7803-2503-6

Type

conf

DOI

10.1109/MEMSYS.1995.472598

Filename

472598