DocumentCode :
2030809
Title :
Ultrasound barrier based on packaged micromachined membrane resonators
Author :
Hornung, M. ; Frey, R. ; Brand, O. ; Baltes, H. ; Hafner, C.
fYear :
1995
fDate :
29 Jan-2 Feb 1995
Firstpage :
334
Keywords :
Acoustic transducers; Biomembranes; Etching; Fabrication; Object detection; Packaging; Silicon; Textile industry; Ultrasonic imaging; Ultrasonic transducers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
Type :
conf
DOI :
10.1109/MEMSYS.1995.472599
Filename :
472599
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2030809
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