DocumentCode
2031086
Title
Micro-optical components for fiber and integrated optics realized by the LIGA technique
Author
Gerner, M. ; Paatzsch, T. ; Weber, L. ; Schift, H. ; Smaglinski, I. ; Bauer, H.-D. ; Abraham, M. ; Ehrfeld, W.
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
328
Keywords
Embossing; Integrated optics; Lithography; Microoptics; Optical fibers; Optical polymers; Optical refraction; Optical sensors; Optical waveguides; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472600
Filename
472600
Link To Document