Title :
Development of roll press UV imprint process for replication of micro lens array on the large and thin quartz substrate
Author :
Li, L. ; Ishii, K. ; Tsutsui, Y. ; Shoji, S. ; Mizuno, J.
Author_Institution :
Major in Nano-Sci. & Nano-Eng., Waseda Univ., Tokyo, Japan
Abstract :
In this study, micro lens arrays (MLAs) fabrication process was carried out using flexible replica mold and an original roll press UV imprint system. We successfully demonstrated MLAs fabrication process with high throughput. The lens patterns of 30 × 100 mm2 in area replicated by two photo-curable resins were formed on the quartz substrate of 0.15 mm in thickness. This fabrication process is applicable for MLAs fabrication of next generation optical devices.
Keywords :
microlenses; moulding; optical arrays; optical fabrication; pressing; quartz; rolling; SiO2; flexible replica mold; microlens array replication; quartz substrate; roll press UV imprint process development; size 0.15 mm; Fabrication; Resins; UV imprint; flexible replica mold; micro lens arrays; quartz substrate; roll press UV imprint system;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on
Conference_Location :
Kyoto
Print_ISBN :
978-1-4673-1122-9
DOI :
10.1109/NEMS.2012.6196715
