DocumentCode
2031356
Title
Adaptable chip-level microfluidic packaging for a micro-scale gas chromatograph
Author
Ward, Nathan ; Mu, Xiaoyi ; Serrano, Gustavo ; Covington, Elizabeth ; Kurdak, Cagliyan ; Zellers, Edward T. ; Mason, Andrew J. ; Li, Wen
Author_Institution
Dept. of Electr. & Comput. Eng., Michigan State Univ., East Lansing, MI, USA
fYear
2012
fDate
5-8 March 2012
Firstpage
57
Lastpage
60
Abstract
In this paper, we present a robust and adaptable technique to integrate microfluidics with an on-chip thiolate-monolayer-protected gold nanoparticle coated chemiresistorarray for vapor analyte detection in a micro-scale gas chromatograph (μGC). The process involves mounting a sensing chip and capillary tubes within a silicon “extension carrier” (EC), capping the chemiresistor-array with a glass lid, and sealing the microfluidic package with non-sorbent epoxy. The stability and efficacy of the integrated detector cell is elucidated by consistent chip responses induced by the diffusion of vapor analytes though the detector cell.
Keywords
chromatography; integrated circuit packaging; microfluidics; semiconductor device packaging; adaptable chip-level microfluidic packaging; capillary tubes; chip response; detector cell; glass lid; microfluidic package; microscale gas chromatograph; nonsorbent epoxy; on-chip thiolate-monolayer-protected gold nanoparticle coated chemiresistor array; sensing chip; silicon extension carrier; vapor analyte detection; Adaptive arrays; Biology; Biomedical measurements; Feature extraction; Nanoelectromechanical systems; Robustness; Semiconductor device measurement; μGC; chemiresistor array; chip-level packaging; microfluidics;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on
Conference_Location
Kyoto
Print_ISBN
978-1-4673-1122-9
Type
conf
DOI
10.1109/NEMS.2012.6196722
Filename
6196722
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