• DocumentCode
    2031356
  • Title

    Adaptable chip-level microfluidic packaging for a micro-scale gas chromatograph

  • Author

    Ward, Nathan ; Mu, Xiaoyi ; Serrano, Gustavo ; Covington, Elizabeth ; Kurdak, Cagliyan ; Zellers, Edward T. ; Mason, Andrew J. ; Li, Wen

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Michigan State Univ., East Lansing, MI, USA
  • fYear
    2012
  • fDate
    5-8 March 2012
  • Firstpage
    57
  • Lastpage
    60
  • Abstract
    In this paper, we present a robust and adaptable technique to integrate microfluidics with an on-chip thiolate-monolayer-protected gold nanoparticle coated chemiresistorarray for vapor analyte detection in a micro-scale gas chromatograph (μGC). The process involves mounting a sensing chip and capillary tubes within a silicon “extension carrier” (EC), capping the chemiresistor-array with a glass lid, and sealing the microfluidic package with non-sorbent epoxy. The stability and efficacy of the integrated detector cell is elucidated by consistent chip responses induced by the diffusion of vapor analytes though the detector cell.
  • Keywords
    chromatography; integrated circuit packaging; microfluidics; semiconductor device packaging; adaptable chip-level microfluidic packaging; capillary tubes; chip response; detector cell; glass lid; microfluidic package; microscale gas chromatograph; nonsorbent epoxy; on-chip thiolate-monolayer-protected gold nanoparticle coated chemiresistor array; sensing chip; silicon extension carrier; vapor analyte detection; Adaptive arrays; Biology; Biomedical measurements; Feature extraction; Nanoelectromechanical systems; Robustness; Semiconductor device measurement; μGC; chemiresistor array; chip-level packaging; microfluidics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on
  • Conference_Location
    Kyoto
  • Print_ISBN
    978-1-4673-1122-9
  • Type

    conf

  • DOI
    10.1109/NEMS.2012.6196722
  • Filename
    6196722