DocumentCode
2031364
Title
System design for cooperative control of arrayed microactuators
Author
Konishi, Satoshi ; Fujita, Hiroyuki
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
322
Keywords
Actuators; Circuit simulation; Computational modeling; Computer simulation; Control systems; Electrical equipment industry; Feedback; Intelligent sensors; Microactuators; Micromachining;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472601
Filename
472601
Link To Document