Title :
System design for cooperative control of arrayed microactuators
Author :
Konishi, Satoshi ; Fujita, Hiroyuki
fDate :
29 Jan-2 Feb 1995
Keywords :
Actuators; Circuit simulation; Computational modeling; Computer simulation; Control systems; Electrical equipment industry; Feedback; Intelligent sensors; Microactuators; Micromachining;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472601
