Title :
Semiconductor microcrystals with ultra-high sensitivity to mechanical strain at cryogenic temperatures
Author :
Druzhinin, A. ; Lavitska, E. ; Maryamova, I. ; Palewski, T. ; Kutrakov, A.
Author_Institution :
Polytechnic University
Keywords :
Boron; Capacitive sensors; Cryogenics; Impurities; Insulation; Magnetic field induced strain; Piezoresistance; Silicon; Temperature dependence; Temperature sensors;
Conference_Titel :
Low Temperature Electronics, 2002. Proceedings of the 5th European Workshop on
Print_ISBN :
2-86883-606-2
DOI :
10.1109/WOLTE.2002.1022455
