Development of new PEA system using open upper electrode [pulsed electro-acoustic method]

Author

Imai, S. ; Tanaka, Y. ; Fukao, T. ; Takada, T. ; Maeno, T.

Author_Institution

Musashi Inst. of Technol., Tokyo, Japan

fYear

2004

fDate

17-20 Oct. 2004

Firstpage

61

Lastpage

64

Abstract

The pulsed electro-acoustic (PEA) method has been widely used to observe the space charge phenomenon in dielectric materials. Since dielectrics have been sometimes used under specific atmospheres such as the space environment or plasma chamber, there have been demands to monitor the space charge phenomenon under irradiation of radioactive rays, or to observe the space charge behavior during plasma processing. Therefore, we have been developing a new PEA system to observe the space charge distribution under such specific conditions. This system, using an open upper electrode, is able to measure the phenomenon of surface charging as well as the internal space charge profiles.

Keywords

charge measurement; dielectric measurement; plasma materials processing; pulsed electroacoustic methods; radiation effects; space charge; surface charging; bulk charge; dielectric materials; internal space charge profiles; open upper electrode PEA system; plasma chamber; plasma processing; pulsed electro-acoustic method; radioactive rays irradiation; space charge distribution; space charge phenomenon; space environment; surface charge; Atmosphere; Charge measurement; Current measurement; Dielectric materials; Electrodes; Extraterrestrial phenomena; Plasma materials processing; Plasma measurements; Pulsed electroacoustic methods; Space charge;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Insulation and Dielectric Phenomena, 2004. CEIDP '04. 2004 Annual Report Conference on

Print_ISBN

0-7803-8584-5

Type

conf

DOI

10.1109/CEIDP.2004.1364189

Filename

1364189