DocumentCode
2031876
Title
A quantitative analysis of Scratch Drive Actuator using buckling motion
Author
Akiyama, Terunobu ; Fujita, Hiroyuki
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
310
Keywords
Capacitive sensors; Electrostatic actuators; Force measurement; Insulation; Insulators; Microactuators; Motion analysis; Pulse generation; Substrates; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472603
Filename
472603
Link To Document