Title :
CoNiMnP-AAO hard magnetic nanocomposite film for MEMS applications
Author :
Tzu-Yuan Chao ; Jian-Ruei Lin ; Cheng, Yu Ting
Author_Institution :
Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
This paper presents a novel permanent magnetic CoNiMnP-AAO nanocomposite film comprising of a CoNiMnP nanowire array with a high aspect ratio (>;150). The nanocomposite synthesized by a low temperature electroplating process (at 30°C) with AAO template can exhibit a unique magnetic characteristic of vertical shape anisotropy which results in a coercivity (Hc) of 2512Oe, a remanence (Br) up to 3616Gauss and a maximum energy product, (BH)max, of 12.02kJ/m3. Such a simple fabrication process and excellent magnetic property reveal that permanent magnetic CoNiMnP-AAO nanocomposite is with great potential for magnetic N/MEMS applications.
Keywords :
cobalt compounds; magnetic thin films; manganese compounds; micromechanical devices; nanocomposites; nanoelectromechanical devices; nickel compounds; AAO hard magnetic nanocomposite film; AAO template; CoNiMnP; fabrication process; low temperature electroplating process; magnetic N-MEMS applications; magnetic characteristic; maximum energy product; permanent magnetic nanocomposite film; vertical shape anisotropy; Artificial intelligence; Magnetic films; Magnetometers; Nanoelectromechanical systems; Propulsion; AAO; CoNiMnP; hard magnet; nanocomposite;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on
Conference_Location :
Kyoto
Print_ISBN :
978-1-4673-1122-9
DOI :
10.1109/NEMS.2012.6196791
