Title :
Piezoelectric impact force sensor array for tribological research on rigid disk storage media
Author :
Burger, G.J. ; Lammerink, T.S.J. ; Fluitman, J.H.J. ; Imai, S. ; Tokuyama, M. ; Hirose, S.
fDate :
29 Jan-2 Feb 1995
Keywords :
Electrodes; Force measurement; Force sensors; Frequency; Mechanical sensors; Memory; Piezoelectric films; Sensor arrays; Surface waves; Thin film sensors;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472607
