Title :
Catalytic Nano-mobile Robot with finely designed geometry
Author :
Bao, Jingjing ; Nakajima, Masahiro ; Yang, Zhan ; Kojima, Masaru ; Fukuda, Toshio
Author_Institution :
Dept. of Micro-Nano Syst. Eng., Nagoya Univ., Nagoya, Japan
Abstract :
In this paper, we develop the Catalytic Nano-mobile Robot (CNMR) with finely designed geometry swimming in hydrogen peroxide solution as a novel type of nano machine. First we use Focus Ion Beam (FIB) etching to fabricate the nano- mobile robot into the geometry or shape as we desire freely with little constrain. And then an effective and stable manipulation method in sub micrometer scale and liquid environment is shown to operate the fabricated nano-mobile robot. Following up the manipulation method, we get the motion trajectory and carry out the kinetic analysis of the nano-mobile robot with sophisticated geometry. To understand its unique phenomenon, we try to explain the mechanism by showing the relationship between nano-mobile robot´s motion and time duration, concentration of hydrogen peroxide.
Keywords :
focused ion beam technology; geometry; hydrogen compounds; mobile robots; nanofabrication; robot kinematics; sputter etching; trajectory control; catalytic nanomobile robot fabrication; finely designed geometry; focus ion beam etching; hydrogen peroxide solution; kinetic analysis; motion trajectory; nanomachine; sophisticated geometry; stable manipulation method; submicrometer scale; Nanoelectromechanical systems; Polymers; Robots; Substrates; Focus Ion Beam; catalytic nano-mobile robot; sub micro manipulation method in liquid;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on
Conference_Location :
Kyoto
Print_ISBN :
978-1-4673-1122-9
DOI :
10.1109/NEMS.2012.6196795