Title :
3D structures with piezoresistive sensors in standard CMOS
Author :
Hoffman, E. ; Warneke, B. ; Kruglick, E. ; Weigold, J. ; Pister, K.S.J.
fDate :
29 Jan-2 Feb 1995
Keywords :
Aluminum; CMOS process; Etching; Fasteners; Foundries; Micromechanical devices; Piezoresistance; Sensor arrays; Silicon; Xenon;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472608
