DocumentCode :
2033525
Title :
Proceedings IEEE Micro Electro Mechanical Systems. 1995
fYear :
1995
fDate :
Jan. 29 1995-Feb. 2 1995
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Conference_Location :
Amsterdam, Netherlands
Print_ISBN :
0-7803-2503-6
Type :
conf
DOI :
10.1109/MEMSYS.1995.472609
Filename :
472609
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2033525