Title :
AMHS Software Solutions to Increase Manufacturing System Performance
Author :
Wiethoff, Tony ; Swearingen, Casey
Author_Institution :
Material Transp. Software, Intel Corp., Chandler, AZ
Abstract :
In this work, AMHS performance challenges in a ramping 300mm wafer fabrication facilities are identified. Software solutions are described as viable, low cost, minimal fab disruption alternatives to both new and long standing AMHS challenges. Technical design and realized cost, performance, and utilization gains will be shared for various successful software enhancements to the existing fabrication facility´s automation software. The conclusion will outline at a high level some future opportunities in this space and challenges for managing these complex software systems
Keywords :
factory automation; integrated circuit manufacture; materials handling; production facilities; software tools; automated materials handling system; dynamic vehicle reallocation; manufacturing system performance; parallel port delivery; proactive vehicle staging; wafer fabrication; Control systems; Costs; Fabrication; Job shop scheduling; Manufacturing automation; Manufacturing systems; Semiconductor device manufacture; Software performance; Software systems; Vehicles;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference, 2006. ASMC 2006. The 17th Annual SEMI/IEEE
Conference_Location :
Boston, MA
Print_ISBN :
1-4244-0254-9
DOI :
10.1109/ASMC.2006.1638774
