Title :
Analysis on 3-Dimensional spatial electric field of AFM based anodic oxidation
Author :
Liu, Zenglei ; Jiao, Niandong ; Wang, Zhidong ; Dong, Zaili
Author_Institution :
Shenyang Inst. of Autom., Shenyang, China
Abstract :
Atomic force microscope (AFM) based anodic oxidation is an important method to fabricate nano-structures and nano-devices. To realize precise fabrication, electric field between AFM tip and substrate should be under precise control. For precise control of the electric field, a necessary topic is to find out the distribution of the spatial electric field and the relationship between the electric field and parameters. By theoretical analysis we simulated the spatial distribution of the tip/substrate electric field and analyzed the relationship between the electric field and parameters, which were verified by experiments. Our work can provide theoretic support for electric field assisted nanofabrication.
Keywords :
anodisation; atomic force microscopy; electric fields; nanostructured materials; nanotechnology; 3D spatial electric field; AFM based anodic oxidation; AFM tip; atomic force microscope based anodic oxidation; electric field assisted nanofabrication; nanodevice; nanostructures; precise control; precise fabrication; spatial distribution; tip/substrate electric field; Substrates; AFM; anodic oxidation; electrical fabrication;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on
Conference_Location :
Kyoto
Print_ISBN :
978-1-4673-1122-9
DOI :
10.1109/NEMS.2012.6196835
