Title :
A New Category of Particles at 65nm Technology and Below
Author :
Rathei, Dieter ; Neuber, Andreas
Author_Institution :
DR YIELD Software & Solutions, Graz
Abstract :
We aligned experience from yield analysis with knowledge from aerosol physics and found strong evidence that semiconductor manufacturers have face a new category of particles in the next technology nodes at and below 65nm
Keywords :
aerosols; nanoparticles; nanotechnology; particle size; semiconductor device manufacture; 65nm technology; aerosol physics; semiconductor manufacturers; yield analysis; Aerosols; Chemicals; Coagulation; Inspection; Optical filters; Physics; Predictive models; Semiconductor device manufacture; Testing; Virtual manufacturing;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference, 2006. ASMC 2006. The 17th Annual SEMI/IEEE
Conference_Location :
Boston, MA
Print_ISBN :
1-4244-0254-9
DOI :
10.1109/ASMC.2006.1638787
