Title :
Characterization of super-harmonic effect using piezoelectric film cantilever with a proof mass in the point
Author :
Ishinabe, H. ; Kobayashi, Takehiko ; Wang, Dong ; Itoh, Takayuki ; Maeda, Ryutaro
Author_Institution :
Micro Eng. & Micro Syst. Lab., Ibaraki Univ., Hitachi, Japan
Abstract :
The super-harmonic effect has been studied using a piezoelectric micro-cantilever with a proof mass. The fabricated prototype device, comprised with a multilayer of Pt/Ti/PZT/Pt/Ti/SiO2 deposited on a silicon-on-insulator (SOI) wafer, has been measured to have an eigenstate frequency of around 816 Hz. The driven frequencies of 204, 272, 409 and 816 Hz have been then converted into the resonant one via the super-harmonic vibration, corresponding to a sudden increase of output voltage, based on our preliminary characterizations.
Keywords :
cantilevers; lead compounds; microfabrication; micromechanical devices; oscillators; piezoelectric devices; platinum; silicon compounds; silicon-on-insulator; titanium; Pt-Ti-PZT-Pt-Ti-SiO2; SOl wafer; frequency 204 Hz; frequency 272 Hz; frequency 409 Hz; frequency 816 Hz; microfabricated oscillators; piezoelectric film cantilever; proof mass; prototype device; silicon-on-insulator wafer; super-harmonic effect; Acceleration; Nanoelectromechanical systems; Oscilloscopes; Sensors; Vibrations; Eigenstate frequency; Micro-cantilever; PZT thin film; Proof mass; Super-harmonic effect;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on
Conference_Location :
Kyoto
Print_ISBN :
978-1-4673-1122-9
DOI :
10.1109/NEMS.2012.6196851
