Title :
Fast self-resonant startup procedure for digital MEMS gyroscope system
Author :
Ge, Fei ; Liu, Dachuan ; Lin, Longtao ; Yang, Zhenchuan ; Yan, Guizhen
Author_Institution :
Inst. of Microelectron., Peking Univ., Beijing, China
Abstract :
This paper describes a control procedure for the startup of a digital MEMS gyroscope system. Unlike the normal operating mode in which the gyroscope is actuated by synthesized sinusoidal drive signal, self-resonance of the gyroscope is stimulated by feeding back the drive-sense signal and converting it to a square-wave drive signal. During this procedure the resonant frequency that is near the natural frequency of the gyroscope can be calculated, and then provides a key parameter for the sinusoidal wave synthesizer, which will generate high-quality reference signals for driving and demodulation. Experiment shows a rapid rising of the magnitude of vibration, resulting a faster startup procedure for the system.
Keywords :
demodulation; gyroscopes; microsensors; vibrations; angular rate sensor; control procedure; demodulation; digital MEMS gyroscope system; drive-sense signal; high-quality reference signal; natural frequency; resonant frequency; self-resonant startup procedure; sinusoidal wave synthesizer; square-wave drive signal; vibration magnitude; Demodulation; Gyroscopes; Micromechanical devices; Synthesizers; Direct Digital Synthesis; FPGA; MEMS gyroscope; self-resonace;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on
Conference_Location :
Kyoto
Print_ISBN :
978-1-4673-1122-9
DOI :
10.1109/NEMS.2012.6196864
