DocumentCode
2034646
Title
The manufacture of micropillars with high depth-to-width ratio, and the comparison between two typical materials
Author
Wang, Zhe ; Qin, Xian
Author_Institution
Singapore-MIT Alliance for Res. & Technol. (SMART) Center, Singapore, Singapore
fYear
2012
fDate
5-8 March 2012
Firstpage
677
Lastpage
680
Abstract
This paper demonstrates a new method in manufacturing micropillars with a relative high depth-to-width ratio, compared with former works. As is known that micropillars enjoy a wide range of applications in the field of biology and chemistry, such as cancer drug screening, the auto-formation of artificial vessels, and so forth, the strict demand for high depth-to-width ratio haven´t effectively settled in conventional MEMS technology. Also considering other means, for instance, through the stereolithographic printing process is of high cost, we propose a rapid way that combined the laser drilling as well as molding to realize the whole procedure. And we will discuss the diverseness of two materials, PMMA (Polymethylmethacrylate) and PDMS (polydimethylsiloxane), in fabricating the micropillars. Some simulations contribute to our deeper comprehension of the pillar structure, which mainly lie in strain behavior.
Keywords
laser beam machining; microfabrication; micromechanical devices; polymers; prosthetics; rapid prototyping (industrial); MEMS technology; PDMS; PMMA; artificial vessels autoformation; biology; cancer drug screening; chemistry; depth-to-width ratio; laser drilling; micropillar manufacture; polydimethylsiloxane; polymethylmethacrylate; stereolithographic printing process; Biology; Fabrication; Substrates; CO2 laser drilling technique; PDMS; PMMA; micropillar; molding micro-fabrication;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on
Conference_Location
Kyoto
Print_ISBN
978-1-4673-1122-9
Type
conf
DOI
10.1109/NEMS.2012.6196866
Filename
6196866
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