Title :
The manufacture of micropillars with high depth-to-width ratio, and the comparison between two typical materials
Author :
Wang, Zhe ; Qin, Xian
Author_Institution :
Singapore-MIT Alliance for Res. & Technol. (SMART) Center, Singapore, Singapore
Abstract :
This paper demonstrates a new method in manufacturing micropillars with a relative high depth-to-width ratio, compared with former works. As is known that micropillars enjoy a wide range of applications in the field of biology and chemistry, such as cancer drug screening, the auto-formation of artificial vessels, and so forth, the strict demand for high depth-to-width ratio haven´t effectively settled in conventional MEMS technology. Also considering other means, for instance, through the stereolithographic printing process is of high cost, we propose a rapid way that combined the laser drilling as well as molding to realize the whole procedure. And we will discuss the diverseness of two materials, PMMA (Polymethylmethacrylate) and PDMS (polydimethylsiloxane), in fabricating the micropillars. Some simulations contribute to our deeper comprehension of the pillar structure, which mainly lie in strain behavior.
Keywords :
laser beam machining; microfabrication; micromechanical devices; polymers; prosthetics; rapid prototyping (industrial); MEMS technology; PDMS; PMMA; artificial vessels autoformation; biology; cancer drug screening; chemistry; depth-to-width ratio; laser drilling; micropillar manufacture; polydimethylsiloxane; polymethylmethacrylate; stereolithographic printing process; Biology; Fabrication; Substrates; CO2 laser drilling technique; PDMS; PMMA; micropillar; molding micro-fabrication;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on
Conference_Location :
Kyoto
Print_ISBN :
978-1-4673-1122-9
DOI :
10.1109/NEMS.2012.6196866