Title :
A study of tin oxide thin film gas sensors with high oxygen vacancies
Author :
Lin, Chen ; Zhang, Dacheng ; Liu, Xiaodi
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China
Abstract :
In this paper, gas sensors employing nanoscale tin oxide films of high oxygen vacancies were successfully made and tested in order to determine which factors affected the gas sensitivity of them. Firstly electrothermal simulations were carried out to predict the steady-state temperature distributions of the tin oxide thin film and the overall gas sensor using ANSYS™. Then the composition of the tin oxide calcined twice in O2 was analyzed by X-ray photoelectron spectroscopy (XPS). The result of XPS showed that the tin oxide under this condition had high oxygen vacancies. Finally, the ethanol sensing and humidity sensing properties of the gas sensors at various operating voltages and calcined in different conditions were tested. The experimental results showed that high gas sensitivity of the gas sensors could be achieved by changing the internal and external factors.
Keywords :
X-ray photoelectron spectra; calcination; gas sensors; humidity sensors; temperature distribution; thin film sensors; tin compounds; ANSYSTM; SnO2; X-ray photoelectron spectroscopy; XPS; ethanol sensor; gas electrothermal simulation; humidity sensor; oxygen vacancy; steady-state temperature distribution; thin film gas sensor; Chemicals; Heating; Sensitivity; Sputtering; gas sensitivity; gas sensors; high oxygen vacancies; tin oxide;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on
Conference_Location :
Kyoto
Print_ISBN :
978-1-4673-1122-9
DOI :
10.1109/NEMS.2012.6196870
